A novel technique to cover microfluidic systems with parylene-C

Jie Zhu; Ziyu Wang; Xiaotun Qiu; Jonathon Oiler; Cunjiang Yu; Gaofeng Wang; Hongyu Yu

doi:10.1109/NEMS.2010.5592209

A novel technique to cover microfluidic systems with parylene-C

Jie Zhu, Ziyu Wang, Xiaotun Qiu, Jonathon Oiler, Cunjiang Yu, Gaofeng Wang, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

Original language	English (US)
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	840-843
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592209
State	Published - 2010
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: Jan 20 2010 → Jan 23 2010

Publication series

Name	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	1/20/10 → 1/23/10

Keywords

Micro channels and reservoirs
Microfluidic system
Parylene-C
Sacrificial layers
Wax

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2010.5592209

Cite this

Zhu, J., Wang, Z., Qiu, X., Oiler, J., Yu, C., Wang, G., & Yu, H. (2010). A novel technique to cover microfluidic systems with parylene-C. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 840-843). Article 5592209 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592209

A novel technique to cover microfluidic systems with parylene-C. / Zhu, Jie; Wang, Ziyu; Qiu, Xiaotun et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 840-843 5592209 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhu, J, Wang, Z, Qiu, X, Oiler, J, Yu, C, Wang, G & Yu, H 2010, A novel technique to cover microfluidic systems with parylene-C. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592209, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 840-843, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 1/20/10. https://doi.org/10.1109/NEMS.2010.5592209

Zhu J, Wang Z, Qiu X, Oiler J, Yu C, Wang G et al. A novel technique to cover microfluidic systems with parylene-C. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 840-843. 5592209. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). doi: 10.1109/NEMS.2010.5592209

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title = "A novel technique to cover microfluidic systems with parylene-C",

abstract = "This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.",

keywords = "Micro channels and reservoirs, Microfluidic system, Parylene-C, Sacrificial layers, Wax",

author = "Jie Zhu and Ziyu Wang and Xiaotun Qiu and Jonathon Oiler and Cunjiang Yu and Gaofeng Wang and Hongyu Yu",

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AU - Oiler, Jonathon

AU - Yu, Cunjiang

AU - Wang, Gaofeng

AU - Yu, Hongyu

PY - 2010

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AB - This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

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A novel technique to cover microfluidic systems with parylene-C

Abstract

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Keywords

ASJC Scopus subject areas

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