A novel technique to cover microfluidic systems with parylene-C

Jie Zhu, Ziyu Wang, Xiaotun Qiu, Jonathon Oiler, Cunjiang Yu, Gaofeng Wang, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

This paper describes a novel technique for covering microfluidic systems using Parylene-C. Microfluidic systems consisting of micro channels and reservoirs need to be covered to protect or isolate liquid samples from the environment. Thick photoresist and wax are employed as the sacrificial layers in the enclosed micro channels and reservoirs before Parylene-C sealing. The results show that the melted wax improves adherence on a flat and neat Parylene-C film cover and can greatly benefit the mass production. After removing the sacrificial layers, Parylene-C is heated to 120°C to change the residual stress of Parylene-C film to strongly tensile for a flatter surface.

Original languageEnglish (US)
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages840-843
Number of pages4
DOIs
StatePublished - Nov 29 2010
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: Jan 20 2010Jan 23 2010

Publication series

Name2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Other

Other5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
CountryChina
CityXiamen
Period1/20/101/23/10

Keywords

  • Micro channels and reservoirs
  • Microfluidic system
  • Parylene-C
  • Sacrificial layers
  • Wax

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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