@inproceedings{04e9f870983040b6ba009a6f0757d839,
title = "A novel process for silicide formation using dynamic recoil mixing",
author = "Haworth, {L. I.} and Hill, {A. E.} and R. Holwill and R. Pilkington and Robertson, {J. M.}",
year = "1987",
month = jan,
day = "1",
language = "English (US)",
isbn = "9780444704771",
series = "European Solid-State Device Research Conference",
publisher = "IEEE Computer Society",
pages = "237--240",
booktitle = "ESSDERC 1987 - 17th European Solid State Device Research Conference",
note = "17th European Solid State Device Research Conference, ESSDERC 1987 ; Conference date: 14-09-1987 Through 17-09-1987",
}