A novel process for silicide formation using dynamic recoil mixing

L. I. Haworth, A. E. Hill, R. Holwill, R. Pilkington, J. M. Robertson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish (US)
Title of host publicationEuropean Solid-State Device Research Conference
PublisherIEEE Computer Society
Pages237-240
Number of pages4
ISBN (Print)0444704779, 9780444704771
StatePublished - 1987
Externally publishedYes
Event17th European Solid State Device Research Conference, ESSDERC 1987 - Bologna, Italy
Duration: Sep 14 1987Sep 17 1987

Other

Other17th European Solid State Device Research Conference, ESSDERC 1987
CountryItaly
CityBologna
Period9/14/879/17/87

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

Cite this

Haworth, L. I., Hill, A. E., Holwill, R., Pilkington, R., & Robertson, J. M. (1987). A novel process for silicide formation using dynamic recoil mixing. In European Solid-State Device Research Conference (pp. 237-240). [5436457] IEEE Computer Society.

A novel process for silicide formation using dynamic recoil mixing. / Haworth, L. I.; Hill, A. E.; Holwill, R.; Pilkington, R.; Robertson, J. M.

European Solid-State Device Research Conference. IEEE Computer Society, 1987. p. 237-240 5436457.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haworth, LI, Hill, AE, Holwill, R, Pilkington, R & Robertson, JM 1987, A novel process for silicide formation using dynamic recoil mixing. in European Solid-State Device Research Conference., 5436457, IEEE Computer Society, pp. 237-240, 17th European Solid State Device Research Conference, ESSDERC 1987, Bologna, Italy, 9/14/87.
Haworth LI, Hill AE, Holwill R, Pilkington R, Robertson JM. A novel process for silicide formation using dynamic recoil mixing. In European Solid-State Device Research Conference. IEEE Computer Society. 1987. p. 237-240. 5436457
Haworth, L. I. ; Hill, A. E. ; Holwill, R. ; Pilkington, R. ; Robertson, J. M. / A novel process for silicide formation using dynamic recoil mixing. European Solid-State Device Research Conference. IEEE Computer Society, 1987. pp. 237-240
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