A novel process for silicide formation using dynamic recoil mixing

L. I. Haworth, A. E. Hill, R. Holwill, R. Pilkington, J. M. Robertson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationESSDERC 1987 - 17th European Solid State Device Research Conference
PublisherIEEE Computer Society
Pages237-240
Number of pages4
ISBN (Electronic)0444704779
ISBN (Print)9780444704771
StatePublished - Jan 1 1987
Event17th European Solid State Device Research Conference, ESSDERC 1987 - Bologna, Italy
Duration: Sep 14 1987Sep 17 1987

Publication series

NameEuropean Solid-State Device Research Conference
ISSN (Print)1930-8876

Other

Other17th European Solid State Device Research Conference, ESSDERC 1987
CountryItaly
CityBologna
Period9/14/879/17/87

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

Cite this

Haworth, L. I., Hill, A. E., Holwill, R., Pilkington, R., & Robertson, J. M. (1987). A novel process for silicide formation using dynamic recoil mixing. In ESSDERC 1987 - 17th European Solid State Device Research Conference (pp. 237-240). [5436457] (European Solid-State Device Research Conference). IEEE Computer Society.