A new scheduling approach using combined dispatching criteria in wafer fabs

Russ M. Dabbas, John Fowler

Research output: Contribution to journalArticle

110 Citations (Scopus)

Abstract

In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using the new approach show significant improvement versus the use of a single dispatching criterion.

Original languageEnglish (US)
Pages (from-to)501-510
Number of pages10
JournalIEEE Transactions on Semiconductor Manufacturing
Volume16
Issue number3
DOIs
StatePublished - Aug 2003

Fingerprint

distributing
scheduling
Design of experiments
Scheduling
wafers
experiment design
optimization

Keywords

  • Dispatching
  • Scheduling
  • Semiconductor manufacturing
  • Wafer fabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

A new scheduling approach using combined dispatching criteria in wafer fabs. / Dabbas, Russ M.; Fowler, John.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 16, No. 3, 08.2003, p. 501-510.

Research output: Contribution to journalArticle

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