A new scheduling approach using combined dispatching criteria in wafer fabs

Russ M. Dabbas; John Fowler

doi:10.1109/TSM.2003.815201

A new scheduling approach using combined dispatching criteria in wafer fabs

Russ M. Dabbas, John Fowler

Industrial, Systems and Operations Engineering

Research output: Contribution to journal › Article › peer-review

124 Scopus citations

Abstract

In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using the new approach show significant improvement versus the use of a single dispatching criterion.

Original language	English (US)
Pages (from-to)	501-510
Number of pages	10
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	16
Issue number	3
DOIs	https://doi.org/10.1109/TSM.2003.815201
State	Published - Aug 2003

Keywords

Dispatching
Scheduling
Semiconductor manufacturing
Wafer fabrication

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/TSM.2003.815201

Cite this

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abstract = "In this paper, a scheduling approach that combines multiple dispatching criteria into a single rule, with the objective of simultaneously optimizing multiple performance measures is proposed. This is accomplished using a linear combination with relative weights. The weights identify the contribution of the different criteria. The weights' assignments to the different criteria are optimized using a mixture design of experiments (DOE) and multiple response optimization. Results using the new approach show significant improvement versus the use of a single dispatching criterion.",

keywords = "Dispatching, Scheduling, Semiconductor manufacturing, Wafer fabrication",

author = "Dabbas, {Russ M.} and John Fowler",

note = "Funding Information: Manuscript received January 5, 2001; revised January 2, 2003. The work of J. W. Fowler was supported in part by the SRC under Grant 2001-NJ-880 and in part by the National Science Foundation under Grant DMII-9713750. R. M. Dabbas is with the Business & Planning Manager, Motorola Semiconductor Product Sector, Phoenix, AZ 85008 USA. J. Fowler is with the Arizona State University, Department of Industrial Engineering, Tempe, AZ 85287 USA (e-mail: john.fowler@asu.edu). Digital Object Identifier 10.1109/TSM.2003.815201",

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A new scheduling approach using combined dispatching criteria in wafer fabs

Abstract

Keywords

ASJC Scopus subject areas

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