A new 3D multistring code to identify compound oxide nanophase with ion channeling

James Douglas Bradley, Nicole Herbots, Robert Culbertson, Justin Shaw, Vasu Atluri

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A new 3DMultiString computer code for Ion Beam Analysis (IBA) with 4He++ ion channeling combined with Nuclear Resonance Analysis (NRA) is used to analyze order in continuous layers of silicon dioxide nucleated on (1×1) Si(100) via the Herbots-Atluri clean (U.S. patent 6,613,677) in air at 300 K. 3DMultiString simulations lead to the identification of a new two-dimensional nanophase of tetragonally distorted β-cristobalite SiO2 (annotated β-c SiO2) with a critical thickness of 2 nm from the (1×1) Si(100)/β-c SiO2 interface to the β-c SiO2/amorphous SiO2 interface (annotated β-c SiO2/a-SiO2). 3DMultiString simulations of IBA data taken on this newβ-c SiO2/(1×1) Si(100) interphase includes channeling along the three <100>, <110>, and <111> axes of Si(100) in combination 160(α, α)160 3.045 MeV NRA to measure oxygen areal densities corresponding to nm-thick films. In this way, the critical thickness of the β-c SiO2 nanophase can be established as a function of oxygen coverage. This new 3DMultiSTRING computer code is derived from the original 3DSTRING program that originated at Bell Labs, NJ.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings - Characterization of Oxide/Semiconductor Interfaces for CMOS Technologies
Pages109-114
Number of pages6
StatePublished - Dec 1 2007
EventCharacterization of Oxide/Semiconductor Interfaces for CMOS Technologies - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings
Volume996
ISSN (Print)0272-9172

Other

OtherCharacterization of Oxide/Semiconductor Interfaces for CMOS Technologies - 2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/9/074/13/07

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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