A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Haluk Kulah; Junseok Chae; Navid Yazdi; Khalil Najafi

A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Haluk Kulah, Junseok Chae, Navid Yazdi, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

Original language	English (US)
Title of host publication	Digest of Technical Papers - IEEE International Solid-State Circuits Conference
Editors	L.C. Fujino, A. Grabel, D. Jeager, K.C. Smith
State	Published - 2003
Externally published	Yes
Event	2003 Digest of Technical Papers - , United States Duration: Feb 9 2003 → Feb 13 2003

Other

Other	2003 Digest of Technical Papers
Country/Territory	United States
Period	2/9/03 → 2/13/03

ASJC Scopus subject areas

Electrical and Electronic Engineering
Hardware and Architecture

Cite this

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title = "A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers",

abstract = "A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.",

author = "Haluk Kulah and Junseok Chae and Navid Yazdi and Khalil Najafi",

year = "2003",

language = "English (US)",

editor = "L.C. Fujino and A. Grabel and D. Jeager and K.C. Smith",

booktitle = "Digest of Technical Papers - IEEE International Solid-State Circuits Conference",

note = "2003 Digest of Technical Papers ; Conference date: 09-02-2003 Through 13-02-2003",

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T1 - A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

AU - Kulah, Haluk

AU - Chae, Junseok

AU - Yazdi, Navid

AU - Najafi, Khalil

PY - 2003

Y1 - 2003

N2 - A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

AB - A multi-step electromechanical ΣΔ modulator for μg accelerometers is described. A two-element sensor array is used in two ΣΔ loops and resolution improves by >2x compared to a conventional 2nd-order ΣΔ modulator. This CMOS chip operates at 1MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.

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M3 - Conference contribution

AN - SCOPUS:0037630925

BT - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

A2 - Fujino, L.C.

A2 - Grabel, A.

A2 - Jeager, D.

A2 - Smith, K.C.

T2 - 2003 Digest of Technical Papers

Y2 - 9 February 2003 through 13 February 2003

ER -

A multi-step electromechanical ΣΔ converter for micro-g capacitive accelerometers

Abstract

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ASJC Scopus subject areas

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