A monolithic three-axis silicon capacitive accelerometer with micro-g resolution

Junseok Chae, H. Kulah, K. Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

39 Scopus citations

Fingerprint

Dive into the research topics of 'A monolithic three-axis silicon capacitive accelerometer with micro-g resolution'. Together they form a unique fingerprint.

Engineering & Materials Science