A monolithic three-axis silicon capacitive accelerometer with micro-g resolution

Junseok Chae, H. Kulah, K. Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Citations (Scopus)

Abstract

A monolithic three-axis silicon capacitive accelerometer utilizing a combined surface and bulk micromachining technology is demonstrated with micro-g resolution. The accelerometer consists of three individual single-axis accelerometers. All three devices have full-wafer thick silicon proof-mass, large area polysilicon sense/drive electrodes, and small sensing gap (2 in size, has > 5pF/g measured sensitivity and sub-μg/√Hz mechanical noise floor for all three axes. The total measured noise floor of the accelerometer hybrid assembled with CMOS interface circuit is 1.60 μg/√Hz, 1.08 μg/√Hz for in-plane and out-of-plane devices, respectively.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages81-84
Number of pages4
Volume1
ISBN (Print)0780377311, 9780780377318
DOIs
StatePublished - 2003
Externally publishedYes
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Fingerprint

Accelerometers
Silicon
Micromachining
Polysilicon
Electrodes
Networks (circuits)

Keywords

  • Accelerometers
  • Circuit noise
  • Crosstalk
  • DH-HEMTs
  • Electrodes
  • Fabrication
  • Micromachining
  • Noise measurement
  • Power dissipation
  • Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Chae, J., Kulah, H., & Najafi, K. (2003). A monolithic three-axis silicon capacitive accelerometer with micro-g resolution. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (Vol. 1, pp. 81-84). [1215258] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215258

A monolithic three-axis silicon capacitive accelerometer with micro-g resolution. / Chae, Junseok; Kulah, H.; Najafi, K.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. p. 81-84 1215258.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chae, J, Kulah, H & Najafi, K 2003, A monolithic three-axis silicon capacitive accelerometer with micro-g resolution. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. vol. 1, 1215258, Institute of Electrical and Electronics Engineers Inc., pp. 81-84, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1215258
Chae J, Kulah H, Najafi K. A monolithic three-axis silicon capacitive accelerometer with micro-g resolution. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2003. p. 81-84. 1215258 https://doi.org/10.1109/SENSOR.2003.1215258
Chae, Junseok ; Kulah, H. ; Najafi, K. / A monolithic three-axis silicon capacitive accelerometer with micro-g resolution. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2003. pp. 81-84
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