Abstract
This paper reports a micromachined Pirani gauge with dual heat sinks, which can be integrated with MEMS devices inside a vacuum package to monitor long-term pressure changes and stability inside the package. The gauge utilizes small gaps (<1μm) between its heater and two thermal sinks to obtain large dynamic range (20 mTorr to 2 Torr) and high sensitivity (3.5×10 5 (K/W)/Torr). This gauge can resolve leak rates inside a small sealed cavity as low as 3×10 -16 cm 3/sec.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 532-535 |
| Number of pages | 4 |
| State | Published - 2004 |
| Externally published | Yes |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: Jan 25 2004 → Jan 29 2004 |
Other
| Other | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest |
|---|---|
| Country/Territory | Netherlands |
| City | Maastricht |
| Period | 1/25/04 → 1/29/04 |
Keywords
- Packaging
- Pirani gauge
- Pressure sensor
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering