A micromachined Pirani gauge with dual heat sinks

Junseok Chae, Brian H. Stark, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

This paper reports a micromachined Pirani gauge with dual heat sinks, which can be integrated with MEMS devices inside a vacuum package to monitor long-term pressure changes and stability inside the package. The gauge utilizes small gaps (<1μm) between its heater and two thermal sinks to obtain large dynamic range (20 mTorr to 2 Torr) and high sensitivity (3.5×10 5 (K/W)/Torr). This gauge can resolve leak rates inside a small sealed cavity as low as 3×10 -16 cm 3/sec.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages532-535
Number of pages4
StatePublished - 2004
Externally publishedYes
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: Jan 25 2004Jan 29 2004

Other

Other17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
CountryNetherlands
CityMaastricht
Period1/25/041/29/04

Keywords

  • Packaging
  • Pirani gauge
  • Pressure sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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