A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications

X. Qiu, R. Tang, R. Liu, S. Guo, H. Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This study investigates a micro initiator realized by reactive Ni/Al nanolaminates. A self-propagating reaction can be triggered in the Ni/Al film by applying a DC voltage of 1.5 V. This exothermic reaction may raise the film (10 μm in thickness) temperature to as high as 622 K. The measured ignition power of the film was 3 mW with an ignition delay of around 0.63 s. The small ignition energy required (1.89 mJ) and the large energy output (1.86 J) made the Ni/Al film superior to the current resistive heater based initiators. Numerical simulation results demonstrated that different temperatures can be achieved by simply alternating the film thickness and the localization of high temperature exposure was realized to avoid unintentional fire of adjacent initiators.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1665-1668
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Fingerprint

MEMS
Ignition
Exothermic reactions
Temperature
Film thickness
Fires
Computer simulation
Electric potential

Keywords

  • initiator
  • localized heating
  • Reactive Ni/Al nanolaminates

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Qiu, X., Tang, R., Liu, R., Guo, S., & Yu, H. (2011). A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1665-1668). [5969861] https://doi.org/10.1109/TRANSDUCERS.2011.5969861

A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications. / Qiu, X.; Tang, R.; Liu, R.; Guo, S.; Yu, H.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1665-1668 5969861.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Qiu, X, Tang, R, Liu, R, Guo, S & Yu, H 2011, A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969861, pp. 1665-1668, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969861
Qiu X, Tang R, Liu R, Guo S, Yu H. A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1665-1668. 5969861 https://doi.org/10.1109/TRANSDUCERS.2011.5969861
Qiu, X. ; Tang, R. ; Liu, R. ; Guo, S. ; Yu, H. / A micro initiator realized by reactive Ni/Al nanolaminates for MEMS applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1665-1668
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