A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate

Cunjiang Yu, Ziyu Wang, Jie Zhu, Xiaotun Qiu, Oiler Jon, Hongyu Yu, Hanqing Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Stretchable electronics and sensors have been attracting significant attention due to their unique characteristics and wide applications. This paper demonstrates a prototype of a fully stretchable temperature sensor on an elastomeric substrate. The sensor was first fabricated on a silicon-on-insulator (SOI) wafer and then transferred to a pre-strained elastomeric polydimethylsiloxane (PDMS) substrate. Releasing the pre-strain on the PDMS substrate led to the formation of the microscale, periodic, wavy geometries of the sensor. The thin wavy sensor device can be reversibly bent and stretched up to 30% strain without any damage or performance degradation. A theoretical analysis was also developed to estimate the wavy profile.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages675-678
Number of pages4
DOIs
StatePublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period1/24/101/28/10

Fingerprint

Thin film devices
temperature sensors
Temperature sensors
sensors
Sensors
Substrates
Polydimethylsiloxane
thin films
releasing
Silicon
microbalances
Electronic equipment
prototypes
insulators
wafers
degradation
damage
Degradation
Geometry
elastomeric

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Yu, C., Wang, Z., Zhu, J., Qiu, X., Jon, O., Yu, H., & Jiang, H. (2010). A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 675-678). [5442318] https://doi.org/10.1109/MEMSYS.2010.5442318

A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate. / Yu, Cunjiang; Wang, Ziyu; Zhu, Jie; Qiu, Xiaotun; Jon, Oiler; Yu, Hongyu; Jiang, Hanqing.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 675-678 5442318.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yu, C, Wang, Z, Zhu, J, Qiu, X, Jon, O, Yu, H & Jiang, H 2010, A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 5442318, pp. 675-678, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 1/24/10. https://doi.org/10.1109/MEMSYS.2010.5442318
Yu C, Wang Z, Zhu J, Qiu X, Jon O, Yu H et al. A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. p. 675-678. 5442318 https://doi.org/10.1109/MEMSYS.2010.5442318
Yu, Cunjiang ; Wang, Ziyu ; Zhu, Jie ; Qiu, Xiaotun ; Jon, Oiler ; Yu, Hongyu ; Jiang, Hanqing. / A mechanically stretchable temperature sensor based on buckled thin film devices on an elastomeric substrate. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2010. pp. 675-678
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