A low cost polymer based piezo-actuated micropump for drug delivery system

H. Liu, Andrew A.O. Tay, Stephen Y.M. Wan, G. C. Lim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This paper presents the design, realization and simulation of a novel polymer based check-valve micropump actuated by piezoelectric disc. Comparing with silicon substrate, polymer materials have such advantages as flexibility, chemical and biological compatibility, 3D fabrication possibility and low cost in materials and mass production. Laser micromachining technology and precision engineering techniques were used to fabricate the prototype with the dimension of φ18mmx5.2mm. Results of preliminary experiments on fusion bonding between polyimide and polycarbonate are also presented. Using DI water as the pumping medium, the presented micropump is expected to achieve self-priming, bubble tolerance and low power consumption and a flow rate of 30μl/min at the resonance frequency of 300Hz.

Original languageEnglish (US)
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages251-254
Number of pages4
StatePublished - 2004
Externally publishedYes
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: Mar 7 2004Mar 11 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume1

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period3/7/043/11/04

Keywords

  • Flow rate
  • Fusion bonding
  • Laser microfabrication
  • Microvalve
  • Polymer

ASJC Scopus subject areas

  • Engineering(all)

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