A kinetic model for photochemical vapor deposition from germane and silane

Engineering & Materials Science

• Vapor deposition 100%
• Silanes 81%
• Molecules 16%
• Hot Temperature 13%
• Statistical Physics 8%
• Electric lamps 6%
• Superconducting transition temperature 6%
• Activation energy 6%
• Chemical reactions 5%
• Temperature 4%
• Lasers 4%

Chemical Compounds

• Germane 90%
• Silane 60%
• Molecule 22%
• Collision 21%
• Reaction Activation Energy 14%

Physics & Astronomy

• silanes 69%
• vapor deposition 48%
• kinetics 38%
• molecules 9%
• luminaires 5%
• chemical reactions 5%
• transition temperature 4%
• activation energy 4%
• collisions 3%
• physics 3%
• lasers 2%
• temperature 1%