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A kinetic model for photochemical vapor deposition from germane and silane
Meng Tao
Research output
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Contribution to journal
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Article
›
peer-review
8
Scopus citations
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Dive into the research topics of 'A kinetic model for photochemical vapor deposition from germane and silane'. Together they form a unique fingerprint.
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Engineering & Materials Science
Vapor deposition
100%
Silanes
81%
Molecules
16%
Hot Temperature
13%
Statistical Physics
8%
Electric lamps
6%
Superconducting transition temperature
6%
Activation energy
6%
Chemical reactions
5%
Temperature
4%
Lasers
4%
Chemical Compounds
Germane
90%
Silane
60%
Molecule
22%
Collision
21%
Reaction Activation Energy
14%
Physics & Astronomy
silanes
69%
vapor deposition
48%
kinetics
38%
molecules
9%
luminaires
5%
chemical reactions
5%
transition temperature
4%
activation energy
4%
collisions
3%
physics
3%
lasers
2%
temperature
1%