Abstract
A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive micro-accelerometer accelerometer and a CMOS interface circuit is presented. The accelerometer has a 120μm-thick proof mass, 2.2mm × 3.0mm in size with 3.2μm sensing gap defined by DRIE. The circuit has a 95dB dynamic range, a low offset of 370μV and can resolve better than 75aF. The hybrid system has a measured sensitivity of 40mV/g and resolution of 100μg/√Hz.
Original language | English (US) |
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Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
Pages | 623-626 |
Number of pages | 4 |
State | Published - 2002 |
Externally published | Yes |
Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002 |
Other
Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
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Country/Territory | United States |
City | Las Vegas, NV |
Period | 1/20/02 → 1/24/02 |
Keywords
- μg accelerometer
- Inertial sensors
- Sigma-delta
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering