A hybrid silicon-on-glass (SOG) lateral micro-accelerometer with CMOS readout circuitry

Junseok Chae, Haluk Kulah, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

44 Scopus citations

Abstract

A hybrid micro-accelerometer system consisting of a new bulk Silicon-On-Glass (SOG) lateral capacitive micro-accelerometer accelerometer and a CMOS interface circuit is presented. The accelerometer has a 120μm-thick proof mass, 2.2mm × 3.0mm in size with 3.2μm sensing gap defined by DRIE. The circuit has a 95dB dynamic range, a low offset of 370μV and can resolve better than 75aF. The hybrid system has a measured sensitivity of 40mV/g and resolution of 100μg/√Hz.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages623-626
Number of pages4
StatePublished - 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: Jan 20 2002Jan 24 2002

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period1/20/021/24/02

Keywords

  • μg accelerometer
  • Inertial sensors
  • Sigma-delta

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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