A hybrid approach for modelling and analysis of an integrated machine

For the past few years, integrated machines (i.e. cluster tools) in wafer fabrication have been widely used to achieve reductions in cycle time, contamination, operator handling, capital costs and required floor space. The integration among several processing steps can lead to savings in cycle time, labour costs and inventory, and often provides a dramatic opportunity for yield improvement by preventing contamination. However, because of its complex configurations, modelling and analysis on the activities of an integrated machine is not an easy task. In this paper, a hybrid approach is introduced in order to model and to analyse the activities of the integrated machine.