Fingerprint
Dive into the research topics of 'A high-performance surface-micromachined pirani gauge in summit V™'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A high-performance surface-micromachined pirani gauge in summit V™
Brian H. Stark, Junseok Chae, Andrew Kuo, Andrew Oliver, Khalil Najafi
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
16
Scopus
citations