A high-performance surface-micromachined pirani gauge in summit V™

Brian H. Stark, Junseok Chae, Andrew Kuo, Andrew Oliver, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

This paper presents a new type of surface micromachined polysilicon Pirani gauge that is designed to monitor pressure in micro packages. This gauge can measure absolute pressure from greater than 760Torr to less than 10mTorr. The gauge utilizes a double heat sink design to maximize dynamic range while maintaining adequate pressure sensitivity (∼1×10 3(K/W)/ Torr). A special feature of this gauge is that it achieves high performance using a widely available foundry process. This sensor can be integrated with other devices on the same substrate and packaged to measure leak rates several orders of magnitude smaller than traditional He leak testing.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages295-298
Number of pages4
StatePublished - 2005
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period1/30/052/3/05

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Stark, B. H., Chae, J., Kuo, A., Oliver, A., & Najafi, K. (2005). A high-performance surface-micromachined pirani gauge in summit V™. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 295-298). [TPa13]