TY - JOUR
T1 - A group-technology-coded literature review of semiconductor manufacturing operations publications
T2 - Proceedings of the 1998 ICMTS
AU - Fowler, John
AU - Cochran, Jeffrey K.
AU - Horng, Shwu Min
N1 - Funding Information:
Manuscript received September 24, 1997; revised November 16, 1998. This work was supported in part by NSF-DMI-9713750 and SRC 97-FJ-492. The authors are with the Modeling and Analysis of Semiconductor Manufacturing Laboratory, Department of Industrial Engineering, Arizona State University, Tempe, AZ 85287-5906 USA. Publisher Item Identifier S 0894-6507(99)03777-X.
PY - 1999/5
Y1 - 1999/5
N2 - Modeling and simulation of semiconductor manufacturing operations is a rapidly developing area with a supporting published literature that is exploding in size. In this paper, we present a study of that literature which we use to build a searchable database that is implemented as an Internet site(http://www.eas.asu.edu/~masmlab/Biblio.html). These miconductor manufacturing modeling community needs a focused, electronically accessible, and better structured bibliographic resource. To accomplish this, we have developed a database that uses a group technology coding of articles based upon index searching. The importance of this database is not only in collecting many pertinent articles for users, but also in classifying them. The objectives of this site are to be useful to industrial practitioners, faculty members, students, and software developers, and to be widely available, economically feasible, and easily managed. The user can search the database by problem type, measurement metric, modeling technique, organization decision level, publication year, and publication type to find desirable article lists within a short time. The Modeling and Analysis of Semiconductor Manufacturing Laboratory (MASMLAB) database currently contains 559 coded articles relevant to the modeling and analysis of semiconductor manufacturing.
AB - Modeling and simulation of semiconductor manufacturing operations is a rapidly developing area with a supporting published literature that is exploding in size. In this paper, we present a study of that literature which we use to build a searchable database that is implemented as an Internet site(http://www.eas.asu.edu/~masmlab/Biblio.html). These miconductor manufacturing modeling community needs a focused, electronically accessible, and better structured bibliographic resource. To accomplish this, we have developed a database that uses a group technology coding of articles based upon index searching. The importance of this database is not only in collecting many pertinent articles for users, but also in classifying them. The objectives of this site are to be useful to industrial practitioners, faculty members, students, and software developers, and to be widely available, economically feasible, and easily managed. The user can search the database by problem type, measurement metric, modeling technique, organization decision level, publication year, and publication type to find desirable article lists within a short time. The Modeling and Analysis of Semiconductor Manufacturing Laboratory (MASMLAB) database currently contains 559 coded articles relevant to the modeling and analysis of semiconductor manufacturing.
KW - Group codes
KW - Knowledge acquisition
KW - Modeling
KW - Operations research
UR - http://www.scopus.com/inward/record.url?scp=0033364128&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0033364128&partnerID=8YFLogxK
U2 - 10.1109/66.762884
DO - 10.1109/66.762884
M3 - Review article
AN - SCOPUS:0033364128
SN - 0894-6507
VL - 12
SP - 259
EP - 263
JO - IEEE Transactions on Semiconductor Manufacturing
JF - IEEE Transactions on Semiconductor Manufacturing
IS - 2
Y2 - 23 March 1998 through 26 March 1998
ER -