A genetic algorithm approach to manage ion implantation processes in wafer fabrication

Shwu Min Horng, John Fowler, Jeffery K. Cochran

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'A genetic algorithm approach to manage ion implantation processes in wafer fabrication'. Together they form a unique fingerprint.

Business & Economics

Engineering & Materials Science