Abstract

We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.1 7-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages96-99
Number of pages4
DOIs
StatePublished - 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: Jan 25 2009Jan 29 2009

Other

Other22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
CountryItaly
CitySorrento
Period1/25/091/29/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Je, S. S., Kim, J., Kozicki, M., & Chae, J. (2009). A directional capacitive mems microphone using nano-Electrodeposits. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 96-99). [4805328] https://doi.org/10.1109/MEMSYS.2009.4805328