A directional capacitive mems microphone using nano-Electrodeposits

Sang Soo Je; Jeonghwan Kim; Michael Kozicki; Junseok Chae

doi:10.1109/MEMSYS.2009.4805328

A directional capacitive mems microphone using nano-Electrodeposits

Sang Soo Je, Jeonghwan Kim, Michael Kozicki, Junseok Chae

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.1 7-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.

Original language	English (US)
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	96-99
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805328
State	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

Other

Other	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Country/Territory	Italy
City	Sorrento
Period	1/25/09 → 1/29/09

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

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10.1109/MEMSYS.2009.4805328

Cite this

Je, SS, Kim, J, Kozicki, M & Chae, J 2009, A directional capacitive mems microphone using nano-Electrodeposits. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4805328, pp. 96-99, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 1/25/09. https://doi.org/10.1109/MEMSYS.2009.4805328

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abstract = "We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.1 7-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.",

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doi = "10.1109/MEMSYS.2009.4805328",

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AB - We present an in-situ non-volatile tuning method for adjusting MEMS microphone sensitivity using integrated nano-electrodeposits to achieve high directionality in hearing aids. Using a DC bias at room temperature, nano-electrodeposits are electrochemically formed on a Ag-Ge-Se solid electrolyte film integrated with a microphone diaphragm. The in-situ growth mechanism generates mass/stress redistribution on the diaphragm, tuning microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate the technique can achieve a tuning range of 1.67 dB (24%), corresponding to a 1.1 7-dB Directivity Index (DI) improvement, which is sufficient to enable acoustic directionality in high accuracy microphone arrays.

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BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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A directional capacitive mems microphone using nano-Electrodeposits

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