A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures

Y. Zeng, L. Chen, Terry Alford

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds