A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures

Y. Zeng, L. Chen, Terry Alford

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

For the benefit of reducing capacitance in multilevel interconnect technology, low-k dielectric HSQ (hydrogen silsesquioxane) has been used as a gapfill material in Al-metallizationbased non-etchback embedded scheme. The vias are consequently fabricated through the HSQ layer followed by W plug deposition. In order to reduce the extent of via poisoning and achieve good W/Al contact, Thin Ti/TiN stack films are typically deposited before via plug deposition. In this case, HSQ makes direct contact with the Ti layer. The reliability of the Ti/HSQ structures at elevated temperatures has been systematically studied in this work by using a variety of techniques. These results are also compared with those from Ti/TEOS (Tetraethylorthosilicate) structure, where TEOS is a conventional intra-metal dielectric. When the temperature is below 550 °C, a significant number of oxygen atoms are observed to diffuse into the titanium layer. The primary source of oxygen is believed to come from the HSQ film. When the temperature is above 550 °C, HSQ starts to react with Ti. At 700 °C, a TiO/Ti 5Si 3/HSQ stack structure forms. The Ti/HSQ system exhibits a higher reactivity than that of the Ti/TEOS system.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsG.S. Oehrlein, K. Maex, Y.-C. Joo, S. Ogawa, J.T. Wetzel
Volume612
StatePublished - 2000
EventMaterials, Technology and Reliability for Advanced Interconnetcs and Low-K Dielectrics - San Francisco, CA, United States
Duration: Apr 23 2000Apr 27 2000

Other

OtherMaterials, Technology and Reliability for Advanced Interconnetcs and Low-K Dielectrics
CountryUnited States
CitySan Francisco, CA
Period4/23/004/27/00

Fingerprint

Hydrogen
Temperature
Oxygen
tetraethoxysilane
Titanium
Capacitance
Metals
Atoms

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Zeng, Y., Chen, L., & Alford, T. (2000). A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures. In G. S. Oehrlein, K. Maex, Y-C. Joo, S. Ogawa, & J. T. Wetzel (Eds.), Materials Research Society Symposium - Proceedings (Vol. 612)

A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures. / Zeng, Y.; Chen, L.; Alford, Terry.

Materials Research Society Symposium - Proceedings. ed. / G.S. Oehrlein; K. Maex; Y.-C. Joo; S. Ogawa; J.T. Wetzel. Vol. 612 2000.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zeng, Y, Chen, L & Alford, T 2000, A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures. in GS Oehrlein, K Maex, Y-C Joo, S Ogawa & JT Wetzel (eds), Materials Research Society Symposium - Proceedings. vol. 612, Materials, Technology and Reliability for Advanced Interconnetcs and Low-K Dielectrics, San Francisco, CA, United States, 4/23/00.
Zeng Y, Chen L, Alford T. A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures. In Oehrlein GS, Maex K, Joo Y-C, Ogawa S, Wetzel JT, editors, Materials Research Society Symposium - Proceedings. Vol. 612. 2000
Zeng, Y. ; Chen, L. ; Alford, Terry. / A comparative study of Ti/low-k HSQ (hydrogen silsesquioxane) and Ti/TEOS (tetraethylorthosilicate) structures at elevated temperatures. Materials Research Society Symposium - Proceedings. editor / G.S. Oehrlein ; K. Maex ; Y.-C. Joo ; S. Ogawa ; J.T. Wetzel. Vol. 612 2000.
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