A comparative study of refractory metal nitridation in an NH₃ ambient

Engineering & Materials Science

• Nitridation 100%
• Refractory metals 97%
• Silver 40%
• Rutherford backscattering spectroscopy 34%
• Spectrometry 24%
• Ammonia 19%
• Oxides 15%
• Silicides 12%
• Surface chemistry 12%
• X ray diffraction analysis 11%
• Passivation 11%
• Intermetallics 9%
• Phase transitions 9%
• Annealing 9%
• Adhesion 8%
• Textures 7%
• Substrates 6%
• Fibers 6%

Physics & Astronomy

• refractory metals 82%
• silver 30%
• ammonia 18%
• backscattering 16%
• oxides 11%
• spectroscopy 9%
• silicides 9%
• passivity 8%
• intermetallics 8%
• phase transformations 8%
• adhesion 7%
• textures 7%
• electrical resistivity 5%
• annealing 5%
• fibers 5%
• profiles 4%
• diffraction 4%
• x rays 4%

Chemical Compounds

• Refractory Metal 88%
• Liquid Film 31%
• Rutherford Backscattering Spectroscopy 23%
• Ammonia 14%
• Chemical Passivation 9%
• Crystalline Texture 8%
• Surface Chemistry 8%
• Annealing 7%
• Fiber 5%
• Oxide 4%
• X-Ray Diffraction 4%
• Surface 2%