@inproceedings{7a9fc89a0f384949933eb06621a9e840,
title = "A comparative study of bearing designs and operational environments for harmonic side-drive micromotors",
abstract = "The authors report the development of flange bearing harmonic side-drive (referred to as wobble) micromotors and the results from a comparative study of the operation of flange and center-pin bearing micromotors in different gas environments. Both the flange and center-pin wobble micromotors have been operated with excitation as low as 30 V across 1.5-μm rotor/stator gaps. In contrast to the center-pin bearing wobble micromotors it was found that the performance of the flange bearing wobble micromotors is not significantly affected by the operational environment. A convenient experimental procedure to characterize friction in wobble micromotors has been developed. Additionally, the requisite wobble micromotor dynamic model for extracting the bearing and bushing/flange frictional parameters from the experimental data is discussed.",
author = "Dhuler, {V. R.} and M. Mehregany and Phillips, {S. M.} and Lang, {J. H.}",
year = "1992",
doi = "10.1109/memsys.1992.187713",
language = "English (US)",
isbn = "0780304977",
series = "Proc IEEE Micro Electro Mech Syst Workshop",
publisher = "Publ by IEEE",
pages = "171--176",
booktitle = "Proc IEEE Micro Electro Mech Syst Workshop",
note = "Proceedings of the IEEE Micro Electro Mechanical Systems Workshop ; Conference date: 04-02-1992 Through 07-02-1992",
}