A comparative study of bearing designs and operational environments for harmonic side-drive micromotors

V. R. Dhuler, M. Mehregany, S. M. Phillips, J. H. Lang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

The authors report the development of flange bearing harmonic side-drive (referred to as wobble) micromotors and the results from a comparative study of the operation of flange and center-pin bearing micromotors in different gas environments. Both the flange and center-pin wobble micromotors have been operated with excitation as low as 30 V across 1.5-μm rotor/stator gaps. In contrast to the center-pin bearing wobble micromotors it was found that the performance of the flange bearing wobble micromotors is not significantly affected by the operational environment. A convenient experimental procedure to characterize friction in wobble micromotors has been developed. Additionally, the requisite wobble micromotor dynamic model for extracting the bearing and bushing/flange frictional parameters from the experimental data is discussed.

Original languageEnglish (US)
Title of host publicationProc IEEE Micro Electro Mech Syst Workshop
PublisherPubl by IEEE
Pages171-176
Number of pages6
ISBN (Print)0780304977
StatePublished - Dec 1 1992
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems Workshop - Travemuende, Ger
Duration: Feb 4 1992Feb 7 1992

Publication series

NameProc IEEE Micro Electro Mech Syst Workshop

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems Workshop
CityTravemuende, Ger
Period2/4/922/7/92

ASJC Scopus subject areas

  • Engineering(all)

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    Dhuler, V. R., Mehregany, M., Phillips, S. M., & Lang, J. H. (1992). A comparative study of bearing designs and operational environments for harmonic side-drive micromotors. In Proc IEEE Micro Electro Mech Syst Workshop (pp. 171-176). (Proc IEEE Micro Electro Mech Syst Workshop). Publ by IEEE.