Abstract

In this letter, we present an electromagnetically actuated microspeaker with microelectromechanical systems (MEMS) technology to reduce form factor, cost, and power consumption in hearing aid applications. The microspeaker has multilayer copper coils, a NiFe soft magnet on a polyimide membrane, and a NdFeB permanent magnet on the perimeter. The coil impedance is measured at 1.5 Ω and shows a very flat response across the audio frequency range. The device operates at a very low power, the lowest in MEMS speakers, comparable to that of the macrosize counterparts. A single-turn microspeaker with a diameter of 2.5 mm consumes 11.6 and 0.13 mW to generate a sound pressure level of 129 and 106 dB at 1 kHz, respectively. The measurement uncertainty is less than 10%, and the reproducibility is within 36% among the tested devices.

Original languageEnglish (US)
Pages (from-to)856-858
Number of pages3
JournalIEEE Electron Device Letters
Volume29
Issue number8
DOIs
StatePublished - Aug 2008

Fingerprint

Hearing aids
MEMS
Polyimides
Permanent magnets
Magnets
Copper
Multilayers
Electric power utilization
Acoustic waves
Membranes
Costs
Uncertainty

Keywords

  • Acoustic device
  • Acoustic device fabrication
  • Actuator
  • Hearing aids
  • Loudspeaker
  • Microactuators
  • Microelectromechanical systems (MEMS)
  • Micromachining
  • Microspeaker

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

A compact, low-power, and electromagnetically actuated microspeaker for hearing aids. / Je, Sang Soo; Chae, Junseok.

In: IEEE Electron Device Letters, Vol. 29, No. 8, 08.2008, p. 856-858.

Research output: Contribution to journalArticle

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