A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer

Junseok Chae, Haluk Kulah, Khalil Najafi

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

This paper presents a post-CMOS-compatible micro-machined silicon-on-glass (SOG) in-plane capacitive accelerometer. The accelerometer is a high aspect ratio structure with a 120 μm thick single-crystal silicon proof-mass and 3.4 μm sense gap, bonded to a glass substrate. It is fabricated using a simple 3-mask, 5-step process, and is fully CMOS compatible. A CMOS switched-capacitor readout circuit and an oversampled Σ-Δ modulator are used to read out capacitance changes from the accelerometer. The CMOS chip is 2.6 × 2.4 mm2 in size, utilizes chopper stabilization and correlated double sampling techniques, has a 106 dB open-loop dynamic range, a low input offset of 370 μV, and can resolve better than 20 aF. The accelerometer system has a measured sensitivity of 40 mV g-1 and input referred noise density of 79 μg Hz-1/2. Using the SOG configuration, a post-CMOS monolithic integration technique is developed. The integration technique utilizes dielectric bridges, silicon islands and the SOG configuration to obtain a simple, robust and post-CMOS-compatible process. Utilizing this technique, an integrated SOG accelerometer has been fabricated using the University of Michigan 3 μm CMOS process.

Original languageEnglish (US)
Pages (from-to)336-345
Number of pages10
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number2
DOIs
StatePublished - Feb 2005
Externally publishedYes

Fingerprint

Silicon
accelerometers
high aspect ratio
Accelerometers
Aspect ratio
CMOS
Glass
glass
silicon
electric choppers
Modulators
configurations
Masks
Capacitors
Capacitance
Stabilization
dynamic range
readout
modulators
Single crystals

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer. / Chae, Junseok; Kulah, Haluk; Najafi, Khalil.

In: Journal of Micromechanics and Microengineering, Vol. 15, No. 2, 02.2005, p. 336-345.

Research output: Contribution to journalArticle

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