5GHz low-phase-noise oscillator based on FBAR with low TCF

Hao Zhang, Jongjin Kim, Wei Pang, Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

20 Citations (Scopus)

Abstract

A 5GHz oscillator with phase noise of -109.5 dBc/Hz at 100kHz offset (more than 10 dBc/Hz better than the best LC oscillator and 4 dBc/Hz better than the best value reported in the literature) has recently been demonstrated with a 5 GHz Al/ZnO/Al/SiO2 FBAR (film bulk acoustic resonator). The 5 GHz FBAR is fabricated through a simple, clean, and CMOS-compatible fabrication process, and is measured to have Q of about 300, Kt 2 of 4.3% and TCF (temperature coefficient of frequency) of-8.7ppm/°C between 25 and 100°C.

Original languageEnglish (US)
Title of host publicationDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Pages1100-1101
Number of pages2
Volume1
StatePublished - 2005
Externally publishedYes
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

Fingerprint

Acoustic resonators
Phase noise
Fabrication
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Zhang, H., Kim, J., Pang, W., Yu, H., & Kim, E. S. (2005). 5GHz low-phase-noise oscillator based on FBAR with low TCF. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 (Vol. 1, pp. 1100-1101). [2E4.161]

5GHz low-phase-noise oscillator based on FBAR with low TCF. / Zhang, Hao; Kim, Jongjin; Pang, Wei; Yu, Hongyu; Kim, Eun Sok.

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 1 2005. p. 1100-1101 2E4.161.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, H, Kim, J, Pang, W, Yu, H & Kim, ES 2005, 5GHz low-phase-noise oscillator based on FBAR with low TCF. in Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. vol. 1, 2E4.161, pp. 1100-1101, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 6/5/05.
Zhang H, Kim J, Pang W, Yu H, Kim ES. 5GHz low-phase-noise oscillator based on FBAR with low TCF. In Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 1. 2005. p. 1100-1101. 2E4.161
Zhang, Hao ; Kim, Jongjin ; Pang, Wei ; Yu, Hongyu ; Kim, Eun Sok. / 5GHz low-phase-noise oscillator based on FBAR with low TCF. Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05. Vol. 1 2005. pp. 1100-1101
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