TY - GEN

T1 - 3D vertical RRAM - Scaling limit analysis and demonstration of 3D array operation

AU - Yu, Shimeng

AU - Chen, Hong Yu

AU - Deng, Yexin

AU - Gao, Bin

AU - Jiang, Zizhen

AU - Kang, Jinfeng

AU - Wong, H. S.Philip

PY - 2013/9/9

Y1 - 2013/9/9

N2 - 3D vertical RRAM scaling limit is investigated. 3D RRAM functionality along with a viable write/read scheme for the 3D array are experimentally demonstrated for the first time, using plane electrode with thickness (t m) down to 5 nm to minimize 3D stack height. Through 3D circuit simulation of the write/read margin, we conclude the practical lower bound for the lithographic half-pitch, F, is 26 nm for tm=5 nm and isolation SiO2 thickness of 6 nm, assuming a trench etching aspect ratio of 30. This is equivalent to 0.09F2/bit. Although a 2D array can scale further to F=13 nm, 3D array device density is 11× higher than a 2D array with the same number of bits (16kb). Shrinking tm is more effective for increasing integration density than shrinking F for a 3D array. To enlarge 3D array partition size, it is necessary to replace the commonly used TiN with lower resistivity electrode materials.

AB - 3D vertical RRAM scaling limit is investigated. 3D RRAM functionality along with a viable write/read scheme for the 3D array are experimentally demonstrated for the first time, using plane electrode with thickness (t m) down to 5 nm to minimize 3D stack height. Through 3D circuit simulation of the write/read margin, we conclude the practical lower bound for the lithographic half-pitch, F, is 26 nm for tm=5 nm and isolation SiO2 thickness of 6 nm, assuming a trench etching aspect ratio of 30. This is equivalent to 0.09F2/bit. Although a 2D array can scale further to F=13 nm, 3D array device density is 11× higher than a 2D array with the same number of bits (16kb). Shrinking tm is more effective for increasing integration density than shrinking F for a 3D array. To enlarge 3D array partition size, it is necessary to replace the commonly used TiN with lower resistivity electrode materials.

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M3 - Conference contribution

AN - SCOPUS:84883379890

SN - 9784863483477

T3 - Digest of Technical Papers - Symposium on VLSI Technology

SP - T158-T159

BT - 2013 Symposium on VLSI Technology, VLSIT 2013 - Digest of Technical Papers

T2 - 2013 Symposium on VLSI Technology, VLSIT 2013

Y2 - 11 June 2013 through 13 June 2013

ER -