3D spirals with controlled chirality fabricated using metal-assisted chemical etching of silicon

Owen J. Hildreth, Andrei G. Fedorov, Ching Ping Wong

Research output: Contribution to journalArticle

35 Scopus citations


The ability to fabricate 3D spiraling structures using metal-assisted chemical etching (MaCE) is one of the unique advantages of MaCE over traditional etching methods. However, control over the chirality of the spiraling structures has not been established. In this work, a systematic parametric study was undertaken for MaCE of star-shaped catalysts, examining the influence of arm shape, arm length, number of arms, center core diameter, and catalyst thickness on the rotation direction. This data was used to identify a set of geometric parameters that reliably induce rotation in a predefined direction such that large arrays of 3D spiraling structures can be fabricated with the same chirality. Electroless deposition into the MaCE template was used to examine the full etch path of the catalyst and an experimental fit was established to control rotation angle by adjusting the catalyst's center core diameter. The ability to fabricate large arrays of 3D spiraling structures with predefined chirality could have important applications in photonics and optoelectronics.

Original languageEnglish (US)
Pages (from-to)10004-10012
Number of pages9
JournalACS nano
Issue number11
StatePublished - Nov 27 2012



  • 3D
  • chiral
  • etching
  • metal-assisted chemical etching
  • nanotechnology
  • silicon

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

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