3D out-of-plane rotational etching with pinned catalysts in metal-assisted chemical etching of silicon

Engineering & Materials Science

• Etching 100%
• Catalysts 78%
• Silicon 73%
• Metals 59%
• Nanostructures 37%
• Microstructure 20%
• Geometry 18%
• Delamination 15%

Physics & Astronomy

• catalysts 86%
• etching 70%
• silicon 49%
• metals 47%
• microstructure 18%
• geometry 17%

Chemical Compounds

• Etching 83%
• Catalyst 38%
• Force 21%
• Nanomaterial 19%
• Delamination 18%
• Pressure 8%
• Metal 6%