193 nm excimer laser lift-off for AlGaN/GaN high electron mobility transistors

Xiaotie Wang, Chien Fong Lo, Lu Liu, Camilo V. Cuervo, Ren Fan, Stephen J. Pearton, Brent Gila, Michael R. Johnson, Lin Zhou, David Smith, Jihyun Kim, Oleg Laboutin, Yu Cao, Jerry W. Johnson

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