100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy

Wen Di Li, Chao Wang, Stephen Y. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A wafer-scale (∼4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ∼750 nm and Raman enhancement of ∼ 4.5∼106 were achieved.

Original languageEnglish (US)
Title of host publicationLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
StatePublished - 2010
Externally publishedYes
EventLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 - San Jose, CA, United States
Duration: May 16 2010May 21 2010

Other

OtherLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
CountryUnited States
CitySan Jose, CA
Period5/16/105/21/10

Fingerprint

Nanoimprint lithography
Raman spectroscopy
Etching
lithography
etching
wafers
Fabrication
fabrication
augmentation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Radiation

Cite this

Li, W. D., Wang, C., & Chou, S. Y. (2010). 100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 [5500438]

100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy. / Li, Wen Di; Wang, Chao; Chou, Stephen Y.

Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010. 5500438.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, WD, Wang, C & Chou, SY 2010, 100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy. in Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010., 5500438, Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010, San Jose, CA, United States, 5/16/10.
Li WD, Wang C, Chou SY. 100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy. In Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010. 5500438
Li, Wen Di ; Wang, Chao ; Chou, Stephen Y. / 100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy. Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010. 2010.
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