@inproceedings{58e095a7c9ff4856a2921b86fda5e625,
title = "100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy",
abstract = "A wafer-scale (∼4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ∼750 nm and Raman enhancement of ∼ 4.5∼106 were achieved.",
author = "Li, {Wen Di} and Chao Wang and Chou, {Stephen Y.}",
year = "2010",
doi = "10.1364/cleo.2010.cfb5",
language = "English (US)",
isbn = "9781557528902",
series = "Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010",
publisher = "Association for Computing Machinery",
booktitle = "Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference",
}