Project Details
Description
ArizonaStateUniversityshallconductthefollowingtasks: A1. Processing(metallizationandetching)ofatleastfive(5)deviceswhichincludesatwomask process: a. MesaEtching. b. Metallization. A2. InvestigateprocessingrecipesforbothGaPonGaPandGaPonSideviceswhichinclude informationonthefollowing: a. Etchantpropertiesincludinginformationon: i. Constituentchemicalratios. ii. Etchrates. b. Photolithographyrecipesincludinginformationon: i. Exposure. ii. Photoresist. iii. Developing. c. BestefforteliminationofedgetrencheffectsknowntobepresentinAquaRegiaetched GaP. A3. Assistinassemblingallapplicablereports.
| Status | Finished |
|---|---|
| Effective start/end date | 7/1/12 → 11/20/12 |
Funding
- US Department of Energy (DOE): $19,400.00
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