Wide Bandgap Gallium Phosphide Detectors

Project: Research project

Project Details

Description

ArizonaStateUniversityshallconductthefollowingtasks: A1. Processing(metallizationandetching)ofatleastfive(5)deviceswhichincludesatwomask process: a. MesaEtching. b. Metallization. A2. InvestigateprocessingrecipesforbothGaPonGaPandGaPonSideviceswhichinclude informationonthefollowing: a. Etchantpropertiesincludinginformationon: i. Constituentchemicalratios. ii. Etchrates. b. Photolithographyrecipesincludinginformationon: i. Exposure. ii. Photoresist. iii. Developing. c. BestefforteliminationofedgetrencheffectsknowntobepresentinAquaRegiaetched GaP. A3. Assistinassemblingallapplicablereports.
StatusFinished
Effective start/end date7/1/1211/20/12

Funding

  • US Department of Energy (DOE): $19,400.00

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