PROCESS DEVELOPMENT TOOLS FOR SINGLE WAFER LPCVD REACTORS

Raupp, Gregory (CoI)

Chemical Engineering

Project: Research project

Description

PROCESS DEVELOPMENT TOOLS FOR SINGLE WAFER LPCVD REACTORS

Status	Finished
Effective start/end date	1/1/95 → 3/31/96

Funding

SRCCO Inc.: $175,000.00