Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 1/1/90 → 12/31/91 |
Funding
- SRCCO Inc.: $200,503.00
PROCESS DEVELOPMENT TOOLS FOR SINGLE WAFER LPCVD REACTORS
- Raupp, Gregory (PI)
Project: Research project
Project: Research project
| Status | Finished |
|---|---|
| Effective start/end date | 1/1/90 → 12/31/91 |