PROCESS DEVEL. TOOLS FOR SING. WAFER LPCVD REACTORS

Raupp, Gregory (PI)

Chemical Engineering

Project: Research project

Description

PROCESS DEVEL. TOOLS FOR SING. WAFER LPCVD REACTORS

Status	Finished
Effective start/end date	1/1/92 → 12/31/92

Funding

SRCCO Inc.: $140,000.00