Photocatalytic abatement of N2O and NOx in semiconductor exhaust streams

Project: Research project

Project Details

Description

Photocatalytic abatement of N2O and NOx in semiconductor exhaust streams Photocatalytic abatement of N2O and NOx in semiconductor exhaust streams Our proposal aims to develop a photocatalytic flow-through reactor for the reduction of N2O and NOx. Our team is currently working on a project showing proof of concept of the solar photocatalytic abatement of NOx on in ambient air on the surface of the solar cells. In the present project we will modify our testing set-up to investigate a wider range of gas mixtures, common in tool exhaust, using a variety of UV-light sources rather than sunlight. In this set-up we will evaluate the abatement of N2O and NOx using a variety of catalysts, light sources and gas mixtures. The results of the laboratory studies will be incorporated in a chemical and mass transfer model which will inform (with the laboratory studies) most promising design approaches for flow through reactor set-ups. The latter will be realized, tested in the lab to obtain as final outcome a reactor design that would be applicable to the semiconductor industry and scalable to a pilot-scale installation for in situ testing and evaluation.
StatusActive
Effective start/end date1/1/2112/31/23

Funding

  • SRCCO Inc.: $249,000.00

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