Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces

Project: Research project

Project Details

Description

Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces
StatusFinished
Effective start/end date4/1/109/30/12

Funding

  • OTHER: Domestic Non-ABOR University: $147,890.00

Fingerprint

Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.