Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces

Project: Research project

Project Details

StatusFinished
Effective start/end date2/1/093/31/10

Funding

  • OTHER: Domestic Non-ABOR University: $73,945.00

Fingerprint

Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.