Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces

Project: Research project

Project Details

Description

Optimized Plasma Processes for Cleaning Cu and Cu Barrier Surfaces Optimized Plasma Processes for Cleaning Cu and Cu Barrier Services
StatusFinished
Effective start/end date2/1/093/31/10

Funding

  • OTHER: Domestic Non-ABOR University: $73,945.00

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