Optical Defect Inspection

Optical Defect Inspection Metamaterials Evaluation for Near Field Optical Defect Inspection This project will lay down the foundation for a next-generation infrastructure instrumentation technology for sensing and metrology below the 20nm scale. The technology is based on the manipulation and localization of light in the nanoscale through the use of photonic antennas. These engineered structures up to hundreds of nanometers across but possessing detailed features in the 10-nanometer range, are capable of efficiently bridging the scale gap between the lightwave and nanostructures.