Low temperature synthesis of single crystal-like NiAl thin films for barrier- and liner-free interconnects

Project: Research project

Project Details

Description

Low temperature synthesis of single crystal-like NiAl thin films for barrier- and liner-free interconnects Low temperature synthesis of single crystal-like NiAl thin films for barrier- and liner-free interconnects
StatusActive
Effective start/end date12/15/2110/31/22

Funding

  • INDUSTRY: Domestic Company: $70,000.00