LOW TEMPERATURE PROCESSING OF THIN-FILM CAPACITORS BY ERC-CVD ON HIGH DENSITY INTERCONNECT MULTICHIP

Project: Research project

Project Details

Description

LOW TEMPERATURE PROCESSING OF THIN-FILM CAPACITORS BY ERC-CVD ON HIGH DENSITY INTERCONNECT MULTICHIP LOW TEMPERATURE PROCESSING OF THIN-FILM CAPACITORS BY ERC-CVD ON HIGH DENSITY INTERCONNECT MULTICHIP MODULES
StatusFinished
Effective start/end date3/8/964/30/99

Funding

  • DOD: Navy: $199,836.00

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