LIGHT SCATTERING BY PARTICLES AND PROCESSING DEFECTS IN TRENCH AND LINE STRUCTURES: EXPLORING THE DEFECT-TO-PROCESS VARIATION CONTINUUM

Project: Research project

Project Details

Description

LIGHT SCATTERING BY PARTICLES AND PROCESSING DEFECTS IN TRENCH AND LINE STRUCTURES: EXPLORING THE DEFECT-TO-PROCESS VARIATION CONTINUUM LIGHT SCATTERING BY PARTICLES AND PROCESSING DEFECTS IN TRENCH AND LINE STRUCTURES: EXPLORING THE DEFECT-TO-PROCESS VARIATION CONTINUUM
StatusFinished
Effective start/end date12/22/0012/30/02

Funding

  • INDUSTRY: Various Consortium Members: $163,606.00

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