Investigation of Radiation Effects in Advanced Microelectronic Devices for Developing Predictive Models of Degradation

Investigation of Radiation Effects in Advanced Microelectronic Devices for Developing Predictive Models of Degradation Investigation of Radiation Effects in Advanced Microelectronic Devices for Developing Predictive Models of Degradation Investigation of Radiation Effects in Advanced Microelectronic Devices for Developing Predictive Models of Degradation David J. Smith, Hugh Barnaby, Keith Holbert and Martha R. McCartney Statement of Work This STTR Phase 2 proposal, for submission to Defense Microelectronics Activity (DMEA), will combine the capabilities of (CFDRC) with the complementary expertise of researchers at Arizona State University (ASU). In this collaborative effort, the ASU team members will carry out the following tasks: Task 1: Collaborate with CFDRC and DMEA to identify the following for Case 2 study - suitable device structure and samples, the appropriate radiation effect, radiation exposure parameters and electrical characterization figures-of-merit. Leverage any previous and ongoing projects for the identified device structure considered for this study. Task 2: Share with CFDRC relevant device structural details, irradiation testing parameters, electrical characterization figures-of-merit, and all available electrical characterization data to support all modeling activities (for Case 2). Perform fabrication, radiation exposure, pre- and post-rad characterization of the devices based on parameters identified in Task 1 (for Case 1 and 2). Prepare and deliver irradiated device samples for TEM-based analysis (for Case 1 and 2). A larger sample of data points will be required for using AI/ML based modeling techniques. Task 3: Identify and leverage existing data (from previous and ongoing projects) on TEM analysis of similar device structures or irradiated samples (for both Case 1 and Case 2). Share this data with CFDRC to enable a quick start to the initial modeling activities, including the use of AI/ML based predictive modeling techniques (for Case 2). Task 4: Identify the TEM characterization path to be followed for the irradiated device structures (including sample preparation and TEM-based techniques to be used) in Case 2. Perform sample preparation and analysis of cross-sectional specimens from the irradiated device structures using TEM-based techniques (Case 1 and Case 2). Share preliminary measured data and associated analysis with CFDRC as soon as possible for initial feedback about incorporation into the modeling flow. Provide regular updates on progress and experimental challenges. Task 5: Collaborate with CFDRC in evaluating the physics-based (TCAD, MD) and predictive modeling techniques, behavioral models, and addressing corresponding experimental input requirements. Support demonstration of the integrated modeling methodology (for Case 1 and 2); and plans for technology demonstration and maturation. Task 6: Participate in technical discussions with CFDRC, DMEA, technology transition and commercialization partners to help identify the best solutions for customer needs in Phase II. Contribute to the Phase II regular interim, mid-term, and final reports with work updates, results, and progress towards project goals. Participate in Intellectual property development with CFDRC based on results, analysis, and findings during Phase II.