Exploring Size Dependent Brittle-to-Ductile Transition in Single Crystal Silicon Using High Temperature MEMS

Physics & Astronomy

1. microelectromechanical systems 100%
2. single crystals 64%
3. silicon 55%
4. thin films 53%
5. electron beams 44%
6. fabrication 37%
7. transmission electron microscopy 27%
8. irradiation 26%
9. proposals 19%
10. artifacts 19%
11. plastic deformation 18%
12. film thickness 16%
13. damage 14%
14. room temperature 11%
15. electric potential 11%