ENVIRONMENTALLY - BENIGN ADDITIVE SEMICONDUCTOR PROCESSING

Project: Research project

Project Details

Description

ENVIRONMENTALLY - BENIGN ADDITIVE SEMICONDUCTOR PROCESSING ADDITIVE PROCESSING FOR ENVIRONMENTALLY--BENIGN SEMICONDUCTOR MANUFACTURING
StatusFinished
Effective start/end date9/1/98 → 8/31/02

Funding

  • NSF: Directorate for Engineering (ENG): $287,126.00
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