C1 Project: Tunable Strain Sensor with Nanoscale Resolution Based on Buckled Thin Films

Project: Research project

StatusFinished
Effective start/end date8/1/138/1/14

Funding

  • INDUSTRY: Various Consortium Members: $95,142.00

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sensors
gratings
thin films
strain measurement
plane strain
buckling
microelectronics
metrology
numerical analysis
wafers
scanning
sensitivity
silicon