Building a Better ALD - Use of Plasma Enhanced ALD to Construct Efficient Interference Filters for the FUV

Project: Research project

Project Details

Description

Building a Better ALD - Use of Plasma Enhanced ALD to Construct Efficient Interference Filters for the FUV Building a Better ALD - use of Plasma Enhanced ALD to Construct Efficient Interference Filters for the FUV
StatusFinished
Effective start/end date1/1/1612/31/19

Funding

  • NASA: Goddard Space Flight Center: $795,899.00

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