Project Details
Description
Building a Better ALD - Use of Plasma Enhanced ALD to Construct Efficient Interference Filters for the FUV Building a Better ALD - use of Plasma Enhanced ALD to Construct Efficient Interference Filters for the FUV
Status | Finished |
---|---|
Effective start/end date | 1/1/16 → 12/31/19 |
Funding
- NASA: Goddard Space Flight Center: $795,899.00
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