Aquatic Fate and Toxicity of IIIV Semiconductor Materials in the Presence of Chemical Mechanical Planarization Nanoparticles

Earth & Environmental Sciences

1. semiconductor 100%
2. nanoparticle 85%
3. toxicity 68%
4. slurry 65%
5. sorption 56%
6. complexation 50%
7. chemical 45%
8. isotherm 39%
9. material 37%
10. semiconductor industry 33%
11. ion 29%
12. experiment 27%
13. stack 21%
14. dilution 19%
15. solubility 19%
16. wastewater 15%
17. method 10%