Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators

Project: Research project

Project Details

Description

This is a request for an REU Supplement on an existing award, Anti-shock Scheme Based on Dual-membrane Structure in Capacitive MEMS Sensors and Actuators. An ASU (Arizona State University) Chemical Engineering undergraduate student, Mr. Usamma Amjad, will participate in the project to design and analyze MEMS sensors/actuators interface. He will be supervised by the PI/Co-PI, Ying-Cheng Lai and Junseok Chae.
StatusFinished
Effective start/end date9/1/118/31/16

Funding

  • National Science Foundation (NSF): $368,000.00

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