Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators

Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators Anti-shock Scheme Based on Dual-membrane Structure in Capacitive MEMS Sensors and Actuators (REU Supplement, Award # ECCS-1101797) This is a request for an REU Supplement on an existing award, Anti-shock Scheme Based on Dual-membrane Structure in Capacitive MEMS Sensors and Actuators. An ASU (Arizona State University) Chemical Engineering undergraduate student, Mr. Usamma Amjad, will participate in the project to design and analyze MEMS sensors/actuators interface. He will be supervised by the PI/Co-PI, Ying-Cheng Lai and Junseok Chae.